Wafer-scale arrays of high-Q silica optical microcavities

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dc.citation.epage2493en_US
dc.citation.issueNumber9en_US
dc.citation.spage2489en_US
dc.citation.volumeNumber56en_US
dc.contributor.authorOzgur E.en_US
dc.contributor.authorHuseyinoglu E.en_US
dc.contributor.authorDana, A.en_US
dc.date.accessioned2018-04-12T11:00:57Z
dc.date.available2018-04-12T11:00:57Z
dc.date.issued2017en_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.description.abstractOn-chip high-Q microcavities possess significant potential in terms of integration of optical microresonators into functional optoelectronic devices that could be used in various applications, including biosensors, photonic-integrated circuits, or quantum optics experiments. Yet, despite the convenience of fabricating wafer-scale integrated microresonators with moderate Q values using standard microfabrication techniques, surface-tension-induced microcavities (STIMs), which have atomic-level surface roughness enabling the observation of Q values larger than 106, could only be produced using individual thermal treatment of every single microresonator within the devised area. Here, we demonstrate a facile method for large-scale fabrication of silica STIMs of various morphologies. Q values exceeding 106 are readily obtained using this technique. This study represents a significant advancement toward fabrication of wafer-scale optoelectronic circuitries.en_US
dc.identifier.doi10.1364/AO.56.002489en_US
dc.identifier.issn1559-128X
dc.identifier.urihttp://hdl.handle.net/11693/37037
dc.language.isoEnglishen_US
dc.publisherOSA - The Optical Societyen_US
dc.relation.isversionofhttps://doi.org/10.1364/AO.56.002489en_US
dc.source.titleApplied Opticsen_US
dc.subjectMicrocavitiesen_US
dc.subjectOptoelectronic devicesen_US
dc.subjectPhotonic devicesen_US
dc.subjectQuantum opticsen_US
dc.subjectResonatorsen_US
dc.subjectSilicaen_US
dc.subjectSurface roughnessen_US
dc.subjectAtomic levelsen_US
dc.subjectHigh-Q microcavityen_US
dc.subjectLarge-scale fabricationen_US
dc.subjectMicro resonatorsen_US
dc.subjectMicro-fabrication techniquesen_US
dc.subjectOptical microcavitiesen_US
dc.subjectOptical microresonatorsen_US
dc.subjectPhotonic integrated circuitsen_US
dc.subjectWSI circuitsen_US
dc.titleWafer-scale arrays of high-Q silica optical microcavitiesen_US
dc.typeArticleen_US
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