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      High-Intensity airborne CMUT transmitter array with beam steering

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      Author(s)
      Khan, Talha Masood
      Taşdelen, Akif Sinan
      Yılmaz, Mehmet
      Atalar, Abdullah
      Köymen, Hayrettin
      Date
      2020
      Source Title
      Journal of Microelectromechanical Systems
      Print ISSN
      1057-7157
      Publisher
      IEEE
      Volume
      29
      Issue
      6
      Pages
      1537 - 1546
      Language
      English
      Type
      Article
      Item Usage Stats
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      Abstract
      A 2×2 high-intensity CMUT transmit array that is capable of two-dimensional beam steering is presented. The device uses an ac drive voltage at half the ultrasound frequency without any dc bias, enabling the usage of the entire gap height. The device is designed using a large signal equivalent model approach. A fabrication method that requires a single lithographic mask has been used. The fabricated devices are operated at 76 kHz to beam steer at various angles. An equivalent element pressure of 144 dB// 20 μ Pa at the transducer surface was measured. The entire half-space can be steered without any sidelobes and the beam obtained from the array is in excellent agreement with the theoretical predictions. [2020-0253]
      Keywords
      Airborne ultrasound
      Beam steering
      CMUT
      High intensity
      Transducer array
      Unbiased CMUT
      Permalink
      http://hdl.handle.net/11693/75462
      Published Version (Please cite this version)
      https://dx.doi.org/10.1109/JMEMS.2020.3026094
      Collections
      • Acoustics and Underwater Technologies Research Center (BASTA) 7
      • Department of Electrical and Electronics Engineering 3702
      • Institute of Materials Science and Nanotechnology (UNAM) 1930
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