Low dark current diffusion limited planar type InGaAs photodetectors

Date
2019
Advisor
Supervisor
Co-Advisor
Co-Supervisor
Instructor
Source Title
Proceedings of SPIE Vol. 11129, Infrared Sensors, Devices, and Applications IX
Print ISSN
0277-786X
Electronic ISSN
Publisher
SPIE
Volume
11129
Issue
Pages
1 - 6
Language
English
Journal Title
Journal ISSN
Volume Title
Series
Abstract

In this work, we design and produce 1280x1024 format InGaAs based planar type detectors with 15μm pixel pitch. We have obtained diffusion current limited low dark current (~10fA) and high responsivity (1.08A/W at 1.55μm) values at room temperature conditions. Moreover, dark current modeling is performed using diffusion, generation and recombination (GR) and trap assisted tunneling (TAT) current mechanisms. Ideality factor is extracted from forward bias characteristics. Excellent match between modeling and experimental data is reached. Also, temperature dependency of dark current is studied in 10°C – 60°C ranges. The area and perimeter related dark current components are differentiated using test detectors with changing diameters that are placed next to the detector array structure. Experimental data shows good agreement with theoretical expectations.

Course
Other identifiers
Book Title
Citation
Published Version (Please cite this version)