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      Beam steering in a half-frequency driven airborne CMUT transmitter array

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      Author(s)
      Khan, Talha Masood
      Taşdelen, Akif Sinan
      Yılmaz, Mehmet
      Atalar, Abdullah
      Köymen, Hayrettin
      Date
      2019
      Source Title
      IEEE International Ultrasonics Symposium, IUS 2019
      Print ISSN
      1948-5719
      Electronic ISSN
      1948-5727
      Publisher
      IEEE Computer Society
      Pages
      762 - 765
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      221
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      Abstract
      An airborne Capacitive Micromachined Ultrasonic Transducer (CMUT) transmit array was designed using electromechanical modelling for unbiased airborne operation. The array elements are designed for maximum swing at 10V p-p unbiased drive, whereas conventional practice is to bias CMUT close to the collapsed voltage to achieve higher swing. The devices were fabricated using a customized single photolithographic process with a combination of wet and dry etching. The wafer level fabrication enabled the usage of 2x2 and 3x3 arrays. Driving CMUTs in an unbiased mode at half frequency drives the ‘static pressure’ depressed silicon membrane at a larger swing without letting it collapse. The 2x2 array displays 3.375 kHz bandwidth when characterized in air. The phase and amplitude differences due to the dispersion of resonance frequencies of the elements are compensated for beamformed and beamsteered airborne operation.
      Keywords
      CMUT
      Airborne
      Beamforming
      Microfabrication
      Un-collapsed
      Permalink
      http://hdl.handle.net/11693/52827
      Published Version (Please cite this version)
      https://dx.doi.org/10.1109/ULTSYM.2019.8925995
      Collections
      • Acoustics and Underwater Technologies Research Center (BASTA) 7
      • Department of Electrical and Electronics Engineering 3868
      • Institute of Materials Science and Nanotechnology (UNAM) 2098
      • Nanotechnology Research Center (NANOTAM) 1125
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