The impact of increasing number of growth cycles on the properties of AIN thin films grown at low temperature by plasma enhanced atomic layer deposition

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Author(s)

Alevli, M.

Ozgit-Akgun, C.

Bıyıklı, N.

Date

2012

Source Title

12th International Conference on Atomic Layer Deposition (ALD 2012)

Language

English

Type

Conference Paper

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http://hdl.handle.net/11693/52153

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