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      Acoustic microscopy with mechanical scanning—A review

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      Author(s)
      Quate, C. F.
      Atalar, Abdullah
      Wickramasinghe, H. K.
      Date
      1979-08
      Source Title
      Proceedings of the IEEE
      Print ISSN
      0018-9219
      Electronic ISSN
      1558-2256
      Publisher
      IEEE
      Volume
      67
      Issue
      8
      Pages
      1092 - 1114
      Language
      English
      Type
      Article
      Item Usage Stats
      164
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      256
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      Abstract
      Acoustic waves in liquids are known to have wavelengths comparable to that of visible light if the frequency is in the gigahertz range. The phenomena of Brillouin scattering in liquids is based on such waves. In helium near 2 K acoustic waves with a wavelength of 2000 Å were studied some ten years ago at UCLA. It follows from these observations that an imaging system based on acoustic radiation with a resolving power competitive with the optical microscope is within reach if an ideal lens free from aberrations could be found. Such a lens, which was so elusive at the beginning, is now a simple device and it is the basic component in the acoustic microscope that forms the basis for this review. In this article we will establish the characteristic properties of this new instrument. We will review some of the simple properties of acoustic waves and show how a single spherical surface formed at a solid liquid interface can serve as this ideal lens free from aberrations and capable of producing diffraction limited beams. When this is incorporated into a mechanical scanning system and excited with acoustic frequencies in the microwave range images can be recorded with acoustic wavelengths equal to the wavelength of visible light. We will present images that show the elastic properties of specimens selected from the fields of material science, integrated circuits, and cell biology. The information content in these images will often exceed that of the optical micrographs. In the reflection mode we illuminate the smooth surface of a crystalline material with a highly convergent acoustic beam. The reflected field is perturbed in a unique way that is determined by the elastic properties of the reflecting surface and it shows up in the phase of the reflected acoustic field. There is a distinct and characteristic response at the output when the spacing between the object and the lens is varied. This behavior in the acoustic ieflection microscope provides a rather simple and direct means for monitoring the elastic parameters of a solid surface. It is easy to distinguish between different materials, to determine the layer thickness, and to display variations in the elastic constants on a microscopic scale. These features lead us to believe there is a promising future for the field of acoustic microscopy.
      Keywords
      Acoustic waves
      Lenses
      Optical surface waves
      Liquids
      Frequency
      Acoustic devices
      Biomedical optical imaging
      Optical scattering
      Optical microscopy
      Solids
      Permalink
      http://hdl.handle.net/11693/50766
      Published Version (Please cite this version)
      https://doi.org/10.1109/PROC.1979.11406
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      • Department of Electrical and Electronics Engineering 3702
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