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      Implementation of high quality-factor on-chip tuned microwave resonators at 7GHz

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      Author
      Melik, R.
      Demir, Hilmi Volkan
      Date
      2009
      Source Title
      Microwave and optical technology letters
      Print ISSN
      0895-2477
      Electronic ISSN
      1098-2760
      Publisher
      WILEY
      Volume
      51
      Issue
      2
      Pages
      497 - 501
      Language
      English
      Type
      Article
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      Abstract
      We report on the design, analytical modeling, numerical simulation, fabrication, and experimental characterization of chip-scale microwave resonators that exhibit high quality-factors (Q-factors) in the microwave frequency range. We demonstrate high Q-factors by tuning these microwave resonators with the film capacitance of their LC tank circuits rather than the conventional approach of using external capacitors for tuning. Our chip-scale resonator design further minimizes energy losses and reduces the effect of skin depth leading to high Q-factors even for significantly reduced device areas. Using our new design methodology, we observe that despite the higher resonance frequency and smaller chip size, the Q-factor is improved compared with the previous literature using traditional approaches. For our 540 m 540 m resonator chip, we theoretically compute a Q-factor of 52.40 at the calculated resonance frequency of 6.70 GHz and experimentally demonstrate a Q-factor of 47.10 at the measured resonance frequency of 6.97 GHz. We thus achieve optimal design for microwave resonators with the highest Q-factor in the smallest space for operation at 6.97 GHz.
      Keywords
      Microwave
      Resonators
      Quality-factor
      Tuning
      Fabrication
      Permalink
      http://hdl.handle.net/11693/49496
      Published Version (Please cite this version)
      http://dx.doi.org/10.1002/mop.24103
      Collections
      • Department of Electrical and Electronics Engineering 3339
      • Institute of Materials Science and Nanotechnology 1585
      • Nanotechnology Research Center 870

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