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      Optimization of a collapsed mode CMUT receiver for maximum off-resonance sensitivity

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      Author
      Khan, M.
      Khan, T. M.
      Taşdelen, A. S.
      Yilmaz, M.
      Atalar, Abdullah
      Köymen, Hayrettin
      Date
      2018-07-28
      Source Title
      Journal of Microelectromechanical Systems
      Print ISSN
      1057-7157
      Publisher
      Institute of Electrical and Electronics Engineers
      Volume
      27
      Issue
      5
      Pages
      921 - 930
      Language
      English
      Type
      Article
      Item Usage Stats
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      220
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      Abstract
      We propose an airborne collapse capacitive micromachined ultrasonic transducer (CMUT) as a practical viable ultrasound transducer capable of providing a stable performance at the off-resonance frequencies. Traditional practice is to bias the CMUT plate close to collapse voltage to achieve high coupling coefficient and sense the incoming ultrasound as an open-circuit receive voltage signal of the transducer or short-circuit receive current (SCRC). Maintaining CMUT plate in the vicinity of collapse threshold is rather difficult. In this paper, an analytic approach to design an airborne collapsed-mode CMUT for maximum off-resonance sensitivity is presented. We use small-signal circuit model to evaluate the performance of a collapsed CMUT for varying operating conditions. CMUT operational parameters that yield the highest off-resonance SCRC are directly obtained from performance design curves. Collapsed CMUT plate is then biased in a critical biasing region that produces a stable and maximum off-resonance sensitivity. We experimentally verify and measure a stable sensitivity of a fabricated collapsed CMUT cell of -60 dB V/Pa at 100 kHz when biased between 50 to 65 V. We characterize our linear circuit model performance against the measured performance of collapsed CMUT in air within 4-dB tolerance. [2018-0058]
      Keywords
      CMUT
      Collapsed CMUT sensitivity
      Critical biasing region
      Off-resonance
      Small-signal circuit model
      Permalink
      http://hdl.handle.net/11693/47737
      Published Version (Please cite this version)
      https://www.doi.org/10.1109/JMEMS.2018.2857444
      Collections
      • Acoustics and Underwater Technologies Research Center (BASTA) 5
      • Department of Electrical and Electronics Engineering 3524
      • Institute of Materials Science and Nanotechnology (UNAM) 1775
      • Nanotechnology Research Center (NANOTAM) 1006
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