Nanomechanical motion transducers for miniaturized mechanical systems
Hanay, M. S.
Ekinci, K. L.
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Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.
Microelectromechanical systems (MEMS)
Nanoelectromechanical systems (NEMS)
Micro electromechanical system (MEMS)
Nano electromechanical systems
Published Version (Please cite this version)http://dx.doi.org/10.3390/mi8040108
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