Nanomechanical motion transducers for miniaturized mechanical systems

Date
2017
Authors
Kouh, T.
Hanay, M. S.
Ekinci, K. L.
Editor(s)
Advisor
Supervisor
Co-Advisor
Co-Supervisor
Instructor
Source Title
Micromachines
Print ISSN
Electronic ISSN
2072-666X
Publisher
MDPI AG
Volume
8
Issue
4
Pages
1 - 27
Language
English
Journal Title
Journal ISSN
Volume Title
Series
Abstract

Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.

Course
Other identifiers
Book Title
Citation
Published Version (Please cite this version)