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      Nanomechanical motion transducers for miniaturized mechanical systems

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      Author(s)
      Kouh, T.
      Hanay, M. S.
      Ekinci, K. L.
      Date
      2017
      Source Title
      Micromachines
      Electronic ISSN
      2072-666X
      Publisher
      MDPI AG
      Volume
      8
      Issue
      4
      Pages
      1 - 27
      Language
      English
      Type
      Review
      Item Usage Stats
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      210
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      Abstract
      Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.
      Keywords
      Actuator
      Electromechanics
      Microelectromechanical systems (MEMS)
      Nanoelectromechanical systems (NEMS)
      Nanomechanics
      Optomechanics
      Oscillator
      Resonator
      Sensor
      Transducer
      Actuators
      Electric drives
      Electromechanical devices
      Mechanics
      MEMS
      Nanomechanics
      NEMS
      Oscillators (electronic)
      Resonators
      Sensors
      Electro-mechanics
      Future applications
      High-precision measurement
      Micro electromechanical system (MEMS)
      Nano electromechanical systems
      Nanomechanical motion
      Opto-mechanics
      Reliable operation
      Transducers
      Permalink
      http://hdl.handle.net/11693/38333
      Published Version (Please cite this version)
      http://dx.doi.org/10.3390/mi8040108
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      • Institute of Materials Science and Nanotechnology (UNAM) 2260
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