Nanomechanical motion transducers for miniaturized mechanical systems
Date
2017Source Title
Micromachines
Electronic ISSN
2072-666X
Publisher
MDPI AG
Volume
8
Issue
4
Pages
1 - 27
Language
English
Type
ReviewItem Usage Stats
203
views
views
170
downloads
downloads
Abstract
Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.
Keywords
ActuatorElectromechanics
Microelectromechanical systems (MEMS)
Nanoelectromechanical systems (NEMS)
Nanomechanics
Optomechanics
Oscillator
Resonator
Sensor
Transducer
Actuators
Electric drives
Electromechanical devices
Mechanics
MEMS
Nanomechanics
NEMS
Oscillators (electronic)
Resonators
Sensors
Electro-mechanics
Future applications
High-precision measurement
Micro electromechanical system (MEMS)
Nano electromechanical systems
Nanomechanical motion
Opto-mechanics
Reliable operation
Transducers
Permalink
http://hdl.handle.net/11693/38333Published Version (Please cite this version)
http://dx.doi.org/10.3390/mi8040108Collections
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