Nanomechanical motion transducers for miniaturized mechanical systems
Date
2017
Authors
Kouh, T.
Hanay, M. S.
Ekinci, K. L.
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Source Title
Micromachines
Print ISSN
Electronic ISSN
2072-666X
Publisher
MDPI AG
Volume
8
Issue
4
Pages
1 - 27
Language
English
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Journal Title
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Abstract
Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.
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Keywords
Actuator , Electromechanics , Microelectromechanical systems (MEMS) , Nanoelectromechanical systems (NEMS) , Nanomechanics , Optomechanics , Oscillator , Resonator , Sensor , Transducer , Actuators , Electric drives , Electromechanical devices , Mechanics , MEMS , Nanomechanics , NEMS , Oscillators (electronic) , Resonators , Sensors , Electro-mechanics , Future applications , High-precision measurement , Micro electromechanical system (MEMS) , Nano electromechanical systems , Nanomechanical motion , Opto-mechanics , Reliable operation , Transducers