Laser-slicing of silicon with 3D nonlinear laser lithography

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Author(s)
Date
2017
Source Title
Proceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, CLEO/Europe - EQEC 2017
Publisher
OSA
Language
English
Type
Conference Paper
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Abstract
Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.
Keywords
Silicon
Three-dimensional displays
Lithography
Laser theory
Physics
Permalink
http://hdl.handle.net/11693/37672
Published Version (Please cite this version)
https://doi.org/10.1109/CLEOE-EQEC.2017.8087259
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