Laser-slicing of silicon with 3D nonlinear laser lithography

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Author
Tokel, Onur
Turnalı, Ahmet
Çolakoğlu, T.
İlday, Serim
Borra, M. Z.
Pavlov, Ihor
Bek, A.
Turan, R.
İlday, Fatih Ömer
Date
2017
Source Title
Proceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, CLEO/Europe - EQEC 2017
Publisher
OSA
Language
English
Type
Conference Paper
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Abstract
Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.
Keywords
Silicon
Three-dimensional displays
Lithography
Laser theory
Physics
Permalink
http://hdl.handle.net/11693/37672
Published Version (Please cite this version)
https://doi.org/10.1109/CLEOE-EQEC.2017.8087259
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