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      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
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      Laser-slicing of silicon with 3D nonlinear laser lithography

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      Author(s)
      Tokel, Onur
      Turnalı, Ahmet
      Çolakoğlu, T.
      İlday, Serim
      Borra, M. Z.
      Pavlov, Ihor
      Bek, A.
      Turan, R.
      İlday, Fatih Ömer
      Date
      2017
      Source Title
      Proceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, CLEO/Europe - EQEC 2017
      Publisher
      OSA
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.
      Keywords
      Silicon
      Three-dimensional displays
      Lithography
      Laser theory
      Physics
      Permalink
      http://hdl.handle.net/11693/37672
      Published Version (Please cite this version)
      https://doi.org/10.1109/CLEOE-EQEC.2017.8087259
      Collections
      • Department of Electrical and Electronics Engineering 3702
      • Department of Physics 2397
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