CO2 polishing of femtosecond laser micromachined microfluidic channels
Date
2016Source Title
Conference on Lasers and Electro-Optics
Publisher
Optical Society of America
Language
English
Type
Conference PaperItem Usage Stats
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Abstract
The CO2 polishing of femtosecond laser micromachined channels is studied. The surface quality before and after polishing is observed with naked eye and optical microscope. The method improves imaging of microspheres.