Holograms deep inside Silicon

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3D-2016-JW4A.2.pdf (1.45 MB)
Date
2016
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Source Title
Imaging and Applied Optics 2016
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Optical Society of America
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Language
English
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Conference Paper
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Abstract

Through the Nonlinear Laser Lithography method, we demonstrate the first computer generated holograms fabricated deep inside Silicon. Fourier and Fresnel holograms are fabricated buried inside Si wafers, and a generation algorithm is developed for hologram fabrication. © OSA 2016.

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Keywords
Fabrication , Image acquisition , Lithography , Silicon wafers , Computer generated holograms , Fourier , Fresnel holograms , Generation algorithm , Nonlinear lasers , Si wafer , Holograms
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http://hdl.handle.net/11693/37497
Published Version (Please cite this version)
http://dx.doi.org/10.1364/3D.2016.JW4A.2
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Department of Physics
Department of Electrical and Electronics Engineering