In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
Borra, M. Z.
Kesim, D. K.
Ilday, F. Ö.
Nature Publishing Group
639 - 645
Item Usage Stats
Silicon is an excellent material for microelectronics and integrated photonics 1-3, with untapped potential for mid-infrared optics 4 . Despite broad recognition of the importance of the third dimension 5,6, current lithography methods do not allow the fabrication of photonic devices and functional microelements directly inside silicon chips. Even relatively simple curved geometries cannot be realized with techniques like reactive ion etching. Embedded optical elements 7, electronic devices and better electronic-photonic integration are lacking 8 . Here, we demonstrate laser-based fabrication of complex 3D structures deep inside silicon using 1-μm-sized dots and rod-like structures of adjustable length as basic building blocks. The laser-modified Si has an optical index different to that in unmodified parts, enabling the creation of numerous photonic devices. Optionally, these parts can be chemically etched to produce desired 3D shapes. We exemplify a plethora of subsurface - that is, 'in-chip' - microstructures for microfluidic cooling of chips, vias, micro-electro-mechanical systems, photovoltaic applications and photonic devices that match or surpass corresponding state-of-the-art device performances.
Reactive ion etching
Basic building block
Micro electro mechanical system
Published Version (Please cite this version)http://dx.doi.org/10.1038/s41566-017-0004-4
Showing items related by title, author, creator and subject.
Band gap and optical transmission in the Fibonacci type one-dimensional A5B6C7 based photonic crystals Simsek S.; Koc, H.; Palaz S.; Oltulu, O.; Mamedov, A. M.; Özbay, Ekmel (Wiley-VCH Verlag, 2015)In this work, we present an investigation of the optical properties and band structure calculations for the photonic crystal structures (PCs) based on one-dimensional (1D) photonic crystal. Here we use 1D A5B6C7(A:Sb; ...
Cakmak, A.O.; Colak, E.; Serebryannikov, A.E.; Özbay, Ekmel (Optical Society of American (OSA), 2010)Unidirectional transmission is studied theoretically and experimentally for the gratings with one-side corrugations (non-symmetric gratings), which are based on two-dimensional photonic crystals composed of alumina rods. ...
Kondakcı, H. Esat; Köyle, Özlem; Yaman, Mecit; Dana, Aykutlu; Bayındır, Mehmet (SPIE, 2009)We present the design, fabrication, characterization of spatially variable infrared filter and a demonstration of the filter as a simple infrared spectrometer. A varying photonic band gap filter which consists of thermally ...