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      LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

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      Author(s)
      Poyraz, M.
      Gorgulu, K.
      Sisman, Z.
      Tanrikulu, M. Y.
      Okyay, Ali Kemal
      Date
      2017
      Source Title
      Optical Engineering
      Print ISSN
      0091-3286
      Publisher
      SPIE
      Volume
      56
      Issue
      3
      Pages
      037106-1 - 037106-5
      Language
      English
      Type
      Article
      Item Usage Stats
      197
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      660
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      Abstract
      We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).
      Keywords
      Atomic layer deposition
      Microbolometers
      Uncooled infrared imaging
      Zinc oxide
      Atomic layer deposition
      Atoms
      Bolometers
      Deposition
      Infrared imaging
      Temperature sensors
      Thermography (imaging)
      Absorption co-efficient
      Bi-layer structure
      Long-wave infrared regimes
      Micro-bolometers
      Single-layer structure
      Thermal simulations
      Time constants
      Infrared radiation
      Permalink
      http://hdl.handle.net/11693/37076
      Published Version (Please cite this version)
      http://dx.doi.org/10.1117/1.OE.56.3.037106
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      • Department of Electrical and Electronics Engineering 4011
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