LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
Date
2017Source Title
Optical Engineering
Print ISSN
0091-3286
Publisher
SPIE
Volume
56
Issue
3
Pages
037106-1 - 037106-5
Language
English
Type
ArticleItem Usage Stats
197
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660
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Abstract
We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).
Keywords
Atomic layer depositionMicrobolometers
Uncooled infrared imaging
Zinc oxide
Atomic layer deposition
Atoms
Bolometers
Deposition
Infrared imaging
Temperature sensors
Thermography (imaging)
Absorption co-efficient
Bi-layer structure
Long-wave infrared regimes
Micro-bolometers
Single-layer structure
Thermal simulations
Time constants
Infrared radiation
Permalink
http://hdl.handle.net/11693/37076Published Version (Please cite this version)
http://dx.doi.org/10.1117/1.OE.56.3.037106Collections
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