LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
037106-1 - 037106-5
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We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).
KeywordsAtomic layer deposition
Uncooled infrared imaging
Atomic layer deposition
Long-wave infrared regimes
Published Version (Please cite this version)http://dx.doi.org/10.1117/1.OE.56.3.037106
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