LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
Tanrikulu, M. Y.
Okyay, Ali Kemal
037106-1 - 037106-5
Item Usage Stats
We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).
KeywordsAtomic layer deposition
Uncooled infrared imaging
Atomic layer deposition
Long-wave infrared regimes
Published Version (Please cite this version)http://dx.doi.org/10.1117/1.OE.56.3.037106
Showing items related by title, author, creator and subject.
Conger, C. P.; Süzer, Şefik (2009)A single layer of the Cationic polyelectrolyte poly(allyamine) hydrochloride (PAH) deposited, using the layer-by-layer technique, on a silicon substrate containing 5 nm oxide layer is investigated by XPS while applying an ...
Orlov, A.; Ulianova, V.; Bogdan, O.; Pashkevich, G.; Bıyıklı, Necmi; Goldenberg, Eda; Haider, Ali (IEEE, 2015)The original results of two different types of ZnO nanostructures grown via hydrothermal synthesis on ZnO seed-layers coated by atomic layer deposition process on Si substrates were presented. Scanning electron microscopy ...
Nanoengineering hybrid supramolecular multilayered biomaterials using polysaccharides and self-assembling peptide amphiphiles Borges, J.; Sousa, M. P.; Cinar, G.; Caridade, S. G.; Güler, Mustafa O.; Mano, J. F. (Wiley-VCH Verlag, 2017)Developing complex supramolecular biomaterials through highly dynamic and reversible noncovalent interactions has attracted great attention from the scientific community aiming key biomedical and biotechnological applications, ...