Femtosecond laser written waveguides deep inside silicon
Ilday, F. Ö.
Optical Society of America
3028 - 3031
Item Usage Stats
MetadataShow full item record
Photonic devices that can guide, transfer, or modulate light are highly desired in electronics and integrated silicon (Si) photonics. Here, we demonstrate for the first time, to the best of our knowledge, the creation of optical waveguides deep inside Si using femtosecond pulses at a central wavelength of 1.5 μm. To this end, we use 350 fs long, 2 μJ pulses with a repetition rate of 250 kHz from an Er-doped fiber laser, which we focused inside Si to create permanent modifications of the crystal. The position of the beam is accurately controlled with pump-probe imaging during fabrication. Waveguides that were 5.5 mm in length and 20 μm in diameter were created by scanning the focal position along the beam propagation axis. The fabricated waveguides were characterized with a continuous-wave laser operating at 1.5 μm. The refractive index change inside the waveguide was measured with optical shadowgraphy, yielding a value of 6 × 10−4, and by direct light coupling and far-field imaging, yielding a value of 3.5 × 10−4. The formation mechanism of the modification is discussed.
KeywordsContinuous wave lasers
Pulse repetition rate
Er-doped fiber laser
Refractive index changes
Published Version (Please cite this version)http://dx.doi.org/10.1364/OL.42.003028
Showing items related by title, author, creator and subject.
Kerimoğlu, Serhat; Çakmakçı, Melih (IEEE, 2017)In recent years, studies on manufacturing systems have proved the importance of cooperation of positioning systems with laser cutting technology. The performance of the manufacturing system can be improved by utilizing ...
Texturing of titanium (Ti6Al4V) medical implant surfaces with MHz-repetition-rate femtosecond and picosecond Yb-doped fiber lasers Erdoǧan, M.; Öktem, B.; Kalaycioǧlu H.; Yavaş, S.; Mukhopadhyay P.K.; Eken, K.; Özgören, K.; Aykaç, Y.; Tazebay, U.H.; Ilday F.O. (Optical Society of American (OSA), 2011)We propose and demonstrate the use of short pulsed fiber lasers in surface texturing using MHz-repetition-rate, microjoule- and sub-microjoule-energy pulses. Texturing of titanium-based (Ti6Al4V) dental implant surfaces ...
Synthesis of blue-shifted luminescent colloidal GaN nanocrystals through femtosecond pulsed laser ablation in organic solution Demirel, A.; Öztaş T.; Kurşungöz, C.; Yılmaz, İ.; Ortaç, B. (Springer Netherlands, 2016-05)We demonstrate the synthesis of GaN nanocrystals (NCs) with the sizes of less than the doubled exciton Bohr radius leading quantum confinement effects via a single-step technique. The generation of colloidal GaN nanoparticles ...