CO2 laser polishing of microfluidic channels fabricated by femtosecond laser assisted carving
Solmaz, M. E.
Journal of Micromechanics and Microengineering
Institute of Physics Publishing
115011-1 - 115011-9
Item Usage Stats
MetadataShow full item record
In this study, we investigate the effects of CO2 laser polishing on microscopic structures fabricated by femtosecond laser assisted carving (FLAC). FLAC is the peripheral laser irradiation of 2.5D structures suitable for low repetition rate lasers and is first used to define the microwell structures in fused silica followed by chemical etching. Subsequently, the bottom surface of patterned microwells is irradiated with a pulsed CO2 laser. The surfaces were characterized using an atomic force microscope (AFM) and scanning electron microscope (SEM) in terms of roughness and high quality optical imaging before and after the CO2 laser treatment. The AFM measurements show that the surface roughness improves more than threefold after CO2 laser polishing, which promises good channel quality for applications that require optical imaging. In order to demonstrate the ability of this method to produce low surface roughness systems, we have fabricated a microfluidic channel. The channel is filled with polystyrene bead-laden fluid and imaged with transmission mode microscopy. The high quality optical images prove CO2 laser processing as a practical method to reduce the surface roughness of microfluidic channels fabricated by femtosecond laser irradiation. We further compared the traditional and laser-based glass micromachining approaches, which includes FLAC followed by the CO2 polishing technique.
Femtosecond laser machining
Atomic force microscopy
Optical image storage
Scanning electron microscopy
Femtosecond laser machining
Low repetition rate
Low surface roughness
Published Version (Please cite this version)https://doi.org/10.1088/0960-1317/26/11/115011
Showing items related by title, author, creator and subject.
Balkan, N.; O'Brien-Davies, A.; Thoms, A. B.; Potter, R. J.; Poolton, N.; Adams, M. J.; Masum J.; Bek, A.; Serpenguzel, A.; Aydinli, A.; Roberts J. S. (SPIE - The International Society for Optical Engineering, 1998-01)The hot Electron Light Emission and Lasing in Semiconductor Heterostructures devices (HELLISH-1) is novel surface emitter consisting of a GaAs quantum well, within the depletion region, on the n side of Ga 1-xAlxAs p- n ...
Yilmaz, S.; Ottenhues C.; Theeg T.; Lamrini S.; Scholle K.; Schäfer, M.; Fuhrberg, P.; Sayinc, H.; Ilday, F. O.; Neumann, J.; Overmeyer, L.; Kracht D. (SPIE, 2016)Spectral beam combining of Tm-doped fiber lasers can increase the laser output power while simultaneously maintaining the single mode beam quality. We report on a spectral beam combining technique based on highly efficient ...
Kerimoglu S.; Cakmakci M. (Institute of Electrical and Electronics Engineers Inc., 2017)In recent years, studies on manufacturing systems have proved the importance of cooperation of positioning systems with laser cutting technology. The performance of the manufacturing system can be improved by utilizing ...