Fabrication and characterization of microelectromechanical resonators
Author
Özer, Sevil
Advisor
Ellialtioglu, Recai M.
Date
2006Publisher
Bilkent University
Language
English
Type
ThesisItem Usage Stats
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Abstract
Micromachined mechanical resonators are of considerable interest because of
their many important scienti c and technological applications. They can be used
as a components of radio-frequency lters in communication systems, mechanical
electrometer or magnetometer for sensitive detection of force, charge, pressure.
This work is directed towards the fabrication and characterization of microelectromechanical
resonators, cantilevers and bridges. The SOI cantilever and the
silicon nitride cantilevers and bridges are fabricated by using surface micromachining
techniques. They are fabricated in the Advanced Research Laboratory of
Bilkent University. The center frequencies are ranging from 20 kHz to 270 kHz.
The characterization of cantilevers and bridges are done by using the beam de ection
method and the ber optic interferometer method. The dynamic response
of the rst devices, such as the resonance frequencies and the quality factors will
be reported. In addition, simple beam theory and some fundamental loss mechanisms
will be discussed. The experimental results will also be compared with the
theoretical ones.
Keywords
ResonatorsCantilever
Bridge
Quality Factor
Laser Beam De ection
Fiber Optic Interferometer