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dc.contributor.authorOlcum, Selimen_US
dc.contributor.authorKarademir, Ertuğrulen_US
dc.contributor.authorTaş. Vahdettinen_US
dc.contributor.authorAkça, İmranen_US
dc.contributor.authorKocabaş, Aşkınen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorAydınlı, Aydınlıen_US
dc.coverage.spatialMunich, Germany
dc.date.accessioned2016-02-08T12:26:59Z
dc.date.available2016-02-08T12:26:59Z
dc.date.issued2009-06en_US
dc.identifier.urihttp://hdl.handle.net/11693/28679
dc.descriptionDate of Conference: 14-19 June 2009
dc.descriptionConference name: CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference
dc.description.abstractIn this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication compatible process. The sensitivity of the method can be further increased by integrating the detection circuitry onto the cantilever substrate. We believe that this is a promising method for sensing applications which provide a simple yet sensitive measurement technique using microcantilevers.en_US
dc.language.isoEnglishen_US
dc.source.titleCLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conferenceen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/CLEOE-EQEC.2009.5192614en_US
dc.subjectIntegrated optics
dc.subjectGratings
dc.subjectOptical coupling
dc.subjectOptical waveguides
dc.subjectOptical sensors
dc.subjectHolography
dc.subjectAtom optics
dc.subjectAtomic force microscopy
dc.subjectOptical microscopy
dc.subjectHolographic optical components
dc.titleAn optical microcantilever with integrated grating coupleren_US
dc.typeConference Paperen_US
dc.departmentDepartment of Physicsen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.citation.spage1
dc.citation.epage.
dc.identifier.doi10.1109/CLEOE-EQEC.2009.5192614en_US
dc.publisherIEEE


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