A novel equivalent circuit model for CMUTs
Oğuz, H. Kağan
Senlik, Muhammed N.
Proceedings - IEEE Ultrasonics Symposium
2193 - 2196
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A nonlinear equivalent circuit for immersed transmitting capacitive micromachined ultrasonic transducers (CMUTs) is presented. The velocity profile across the CMUT surface maintains the same form over a wide frequency range. This property and the profile are used to model both the electromechanical conversion and the mechanical section. The model parameters are calculated considering the root mean square of the velocity distribution on the membrane surface as the through variable. The new model is compared with the FEM simulation results. The new model predicts the CMUT performance very accurately. ©2009 IEEE.
Root mean square velocity
Capacitive micromachined ultrasonic transducer
Equivalent circuit model
Nonlinear equivalent circuit
Root Mean Square
Wide frequency range
Finite element method
Published Version (Please cite this version)http://dx.doi.org/10.1109/ULTSYM.2009.5441435
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