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      Optimizing CMUT geometry for high power

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      Author(s)
      Yamaner F.Y.
      Olcum, Selim
      Bozkurt, A.
      Köymen, Hayrettin
      Atalar, Abdullah
      Date
      2010
      Source Title
      2010 IEEE International Ultrasonics Symposium
      Print ISSN
      1051-0117
      Publisher
      IEEE
      Pages
      2247 - 2250
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      111
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      Abstract
      Capacitive micromachined ultrasonic transducers (CMUTs) have demonstratedvarious advantages over piezoelectric transducers. However, current CMUT designsproduce low output pressures with high harmonic distortions. Optimizing thetransducer parameters requires an iterative solution and is too time consumingusing finite element (FEM) modelling tools. In this work, we present a method ofdesigning high output pressure CMUTs with relatively low distortion. We analyzethe behavior of a membrane under high voltage continuous wave operation using anonlinear electrical circuit model. The radiation impedance of an array ofCMUTs is accurately represented using an RLC circuit in the model. The maximummembrane swing without collapse is targeted in the transmit mode. Using SPICEsimulation of the parametric circuit model, we design the CMUT cell withoptimized parameters such as the membrane radius (a), thickness (tm),insulator thickness (ti) and gap height (tg). The modelalso predicts the amount of second harmonic at the output. To verify theaccuracy of the results, we built a FEM model with the same CMUT parameters. Thedesign starts by choosing ti for the given input voltage level.First, a is selected for the maximum radiation resistance of the array at theoperating frequency. Second, tm is found for the resonance at theinput frequency. Third, tg is chosen for the maximum membrane swing.Under this condition, a frequency shift in the resonant frequency occurs. Secondand third steps are repeated until convergence. This method results in a CMUTarray with a high output power and with low distortion. © 2010 IEEE.
      Keywords
      Capacitive micromachined ultrasonic transducer
      Circuit models
      Continuous wave operation
      Electrical circuit models
      FEM models
      Finite elements
      Frequency shift
      Gap height
      High output
      High output power
      High voltage
      High-power
      Input voltages
      Insulator thickness
      Iterative solutions
      Low distortion
      Modelling tools
      Radiation impedance
      Radiation resistance
      RLC circuit
      Second harmonics
      Transmit-mode
      Circuit theory
      Natural frequencies
      Optimization
      Transducers
      Ultrasonics
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/28468
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ULTSYM.2010.5935942
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      • Department of Electrical and Electronics Engineering 3702
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