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      Metamaterial-based wireless RF-MEMS strain sensors

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      Author
      Melik, Rohat
      Ünal, Emre
      Perkgoz, Nihan Kosku
      Puttlitz, C.
      Demir, Hilmi Volkan
      Date
      2010
      Source Title
      SENSORS, 2010 IEEE
      Publisher
      IEEE
      Pages
      2173 - 2176
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      116
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      Abstract
      Approximately 10% of the fractures do not heal properly because of the inability to monitor fracture healing. Standard radiography is not capable of discriminating whether bone healing is occurring normally or aberrantly. We propose and develop an implantable wireless sensor that monitors strain on implanted hardware in real time telemetrically. This enables clinicians to monitor fracture healing. Here we present the development and demonstration of metamaterial-based radiofrequency (RF) micro-electro-mechanical system (MEMS) strain sensors for wireless strain sensing to monitor fracture healing. The operating frequency of these sensors shifts under mechanical loading; this shift is related to the surface strain of the implantable test material. In this work, we implemented metamaterials in two different architectures as bio-implantable wireless strain sensors for the first time. These custom-design metamaterials exhibit better performance as sensors than traditional RF structures (e.g., spiral coils) because of their unique structural properties (splits). They feature a low enough operating frequency to avoid the background absorption of soft tissue and yield higher Q-factors compared to the spiral structures (because their gaps have much higher electric field density). In our first metamaterial architecture of an 5x5 array, the wireless sensor shows high sensitivity (109kHz/kgf, 5.148kHz/microstrain) with low nonlinearity-error (<200microstrain). Using our second architecture, we then improved the structure of classical metamaterial and obtained nested metamaterials that incorporate multiple metamaterials in a compact nested structure and measured strain telemetrically at low operating frequencies. This novel nested metamaterial structure outperformed classical metamaterial structure as wireless strain sensors. By employing nested metamaterial architecture, the operating frequency is reduced from 529.8 MHz to 506.2 MHz while the sensitivity is increased from 0.72 kHz/kgf to 1.09 kHz/kgf. ©2010 IEEE.
      Keywords
      Metamaterial
      Nested metamaterials
      Remote sensing
      RF-MEMS
      Sensitivity
      Split ring resonator
      Strain
      Nested metamaterials
      Resonance frequency
      RF-MEMS
      Sensitivity
      Split ring resonator
      Architecture
      Composite micromechanics
      Electric fields
      Fracture
      Metamaterials
      Microelectromechanical devices
      Natural frequencies
      Optical resonators
      Radiology
      Remote sensing
      Electronic equipment
      Permalink
      http://hdl.handle.net/11693/28438
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ICSENS.2010.5690582
      Collections
      • Department of Electrical and Electronics Engineering 3601
      • Department of Physics 2331
      • Institute of Materials Science and Nanotechnology (UNAM) 1841
      • Nanotechnology Research Center (NANOTAM) 1027
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