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      Hollow-cathode plasma-assisted atomic layer deposition: A novel route for low-temperature synthesis of crystalline III-nitride thin films and nanostructures

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      Author
      Bıyıklı, Necmi
      Ozgit-Akgun, Çağla
      Goldenberg, Eda
      Haider, Ali
      Kızır, Seda
      Uyar, Tamer
      Bolat, Sami
      Tekcan, Burak
      Okyay, Ali Kemal
      Date
      2015
      Source Title
      2015 IEEE 35th International Conference on Electronics and Nanotechnology (ELNANO)
      Publisher
      IEEE
      Pages
      218 - 221
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      134
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      Abstract
      Hollow cathode plasma-assisted atomic layer deposition is a promising technique for obtaining III-nitride thin films with low impurity concentrations at low temperatures. Here we report our efforts on the development of HCPA-ALD processes for III-nitrides together with the properties of resulting thin films and nanostructures. The content will further include nylon 6,6/GaN core/shell and BN/AlN bishell hollow nanofibers, proof-of-concept thin film transistors and UV photodetectors fabricated using HCPA-ALD-grown GaN layers, as well as early results for InN thin films deposited by HCPA-ALD technique. © 2015 IEEE.
      Keywords
      Atomic layer deposition
      Atoms
      Cathodes
      Deposition
      Electrodes
      Electron sources
      Low temperature effects
      Nanofibers
      Nanostructures
      Nanotechnology
      Nitrides
      Photodetectors
      Photons
      Pulsed laser deposition
      Temperature
      Thin film transistors
      Hollow cathodes
      Hollow nanofibers
      III-Nitride
      Low impurity concentrations
      Low temperature synthesis
      Low temperatures
      Proof of concept
      UV photodetectors
      Thin films
      Permalink
      http://hdl.handle.net/11693/28374
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ELNANO.2015.7146876
      Collections
      • Department of Electrical and Electronics Engineering 3614
      • Nanotechnology Research Center (NANOTAM) 1039
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