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      CMUT array element in deep-collapse mode

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      Author
      Olcum, Semih
      Yamaner F.Y.
      Bozkurt, A.
      Köymen, Hayrettin
      Atalar, Abdullah
      Date
      2011
      Source Title
      2011 IEEE International Ultrasonics Symposium
      Print ISSN
      1948-5719
      Publisher
      IEEE
      Pages
      108 - 111
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      Collapse and deep-collapse mode of operations have boosted the pressure outputs of capacitive micromachined ultrasonic transducers (CMUTs) considerably. In this work, we demonstrate a CMUT element operating in the deep-collapse mode with 25 V pulse excitation and without the effects of charge trapping. The fabricated CMUT element consists of 4 by 4 circular cells with 20 μm radius and 1 μm thick plates suspended over a 50 nm cavity. The overall size of the element is 0.190 mm by 0.19 mm. The collapse voltage of the plates is measured to be approximately 3V. By driving the CMUTs with 25V pulses in the deep-collapse mode without any bias, we achieved 1.2 MPa peak-to-peak pressure output on the surface of the CMUT element with a center frequency of 9 MHz and 100% fractional bandwidth. We applied 1000 consecutive electrical pulses with alternating polarity to the element and witnessed no change in the transmitted acoustic pulse. © 2011 IEEE.
      Keywords
      A-center
      Acoustic pulse
      Alternating polarity
      Array elements
      Capacitive micromachined ultrasonic transducer
      Collapse voltage
      Electrical pulse
      Fractional bandwidths
      Mode of operations
      Peak-to-peak
      Pulse excitation
      Thick plate
      Ultrasonic transducers
      Collapsible tubes
      Permalink
      http://hdl.handle.net/11693/28307
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ULTSYM.2011.0027
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      • Department of Electrical and Electronics Engineering 3524
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