Fabrication and characterization of liquid metal-based micro-electromechanical DC-contact switch for RF applications
Noyan, Mehmet Alican
Cetiner, B. A.
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
161 - 164
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We demonstrate that room-temperature liquid metal alloy droplets of Eutectic Gallium Indium (EGaIn) and Gallium Indium Tin alloy (Galinstan) can be actuated using electro-wetting-on-dielectric (EWOD) effect. With the application of 80-100V across the actuation electrode and ground electrode, the metallic liquid droplets were observed to be actuated. We have studied the actuation characteristics using different electrode architectures in open-air configuration as well as in encapsulated microfluidic channel test-beds. The resulting microfluidic DC actuation might potentially be used for RF switching applications.
Electro-wetting on dielectrics