Template-based synthesis of AlN hollow nanofibers via plasma-enhanced atomic layer deposition
Akgun, C. O.
Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012
675 - 678
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Please cite this item using this persistent URLhttp://hdl.handle.net/11693/28170
Aluminum nitride (AlN) hollow nanofibers were synthesized by depositing conformai thin films via plasma-enhanced atomic layer deposition on sacrificial electrospun nylon 66 nanofiber templates having different average fiber diameters. Scanning electron microscopy studies have shown that there is a critical wall thickness-to-inner diameter ratio for these nanostructures to preserve their shapes after the polymeric template has been removed by calcination. Best morphologies were observed for AlN hollow nanofibers prepared by depositing 800 cycles on templates having ∼330 nm average fiber diameter. Al 2p high resolution XPS subpeaks located at 73.5 ± 0.2 eV confirmed the presence of AlN for coated and calcinated samples. Transmission electron microscopy (TEM) images indicated uniform wall thicknesses along the fiber axes. Synthesized AlN hollow nanofibers were polycrystalline with a hexagonal crystal structure as determined by high resolution TEM and selected area electron diffraction.
Atomic layer deposition