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      Preparation of Al 2O 3and AlN nanotubes by atomic layer deposition

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      Author(s)
      Ozgit-Akgun, Çagla
      Kayacı, Fatma
      Dönmez, İnci
      Çağatay, Engin
      Uyar, Tamer
      Bıyıklı, Necmi
      Date
      2012
      Source Title
      Materials Research Society Symposium Proceedings
      Print ISSN
      0272-9172
      Publisher
      Cambridge University Press
      Volume
      1408
      Pages
      133 - 138
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      Al 2O 3 and AlN nanotubes were fabricated by depositing conformal thin films via atomic layer deposition (ALD) on electrospun nylon 66 (PA66) nanofiber templates. Depositions were carried out at 200°C, using trimethylaluminum (TMAl), water (H 2O), and ammonia (NH 3) as the aluminum, oxygen, and nitrogen precursors, respectively. Deposition rates of Al 2O 3 and AlN at this temperature were ∼1.05 and 0.86 Å/cycle. After the depositions, Al 2O 3- and AlN-coated nanofibers were calcinated at 500°C for 2 h in order to remove organic components. Nanotubes were characterized by using X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). AlN nanotubes were polycrystalline as determined by high resolution TEM (HR-TEM) and selected area electron diffraction (SAED). TEM images of all the samples reported in this study indicated uniform wall thicknesses. © 2012 Materials Research Society.
      Keywords
      AlN
      Electrospuns
      High-resolution TEM
      Nylon 66
      Organic components
      Polycrystalline
      Selected area electron diffraction
      TEM images
      Transmission electron microscopy tem
      Trimethylaluminum
      Wall thickness
      Aluminum
      Aluminum nitride
      Atomic layer deposition
      Deposition
      Electron diffraction
      Nanofibers
      Nanowires
      Photoelectrons
      Scanning electron microscopy
      Transmission electron microscopy
      X ray photoelectron spectroscopy
      Nanotubes
      Permalink
      http://hdl.handle.net/11693/28169
      Published Version (Please cite this version)
      http://dx.doi.org/10.1557/opl.2012.38
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      • Institute of Materials Science and Nanotechnology (UNAM) 1930
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