Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation
Mamedov, Amirullah M.
Proceedings of ISAF-ECAPD-PFM 2012
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This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE.
Design and modeling
Finite element models
Inertial measurement unit
Modeling and simulation
Finite element method
Units of measurement
Published Version (Please cite this version)http://dx.doi.org/10.1109/ISAF.2012.6297779
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