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      Learning based cross-coupled control for multi-axis high precision positioning systems

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      Author
      Geçer-Ulu, Nurcan
      Ulu, Erva
      Çakmakçı, Melih
      Date
      2012-10
      Source Title
      ASME 2012, 5th Annual Dynamic Systems and Control Conference joint with the JSME 2012, 11th Motion and Vibration Conference
      Publisher
      ASME
      Volume
      2
      Pages
      535 - 541
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      110
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      Abstract
      In this paper, a controller featuring cross-coupled control and iterative learning control schemes is designed and implemented on a modular two-axis positioning system in order to improve both contour and tracking accuracy. Instead of using the standard contour estimation technique proposed with the variable gain cross-coupled control, a computationally efficient contour estimation technique is incorporated with the presented control design. Moreover, implemented contour estimation technique makes the presented control scheme more suitable for arbitrary nonlinear contours. Effectiveness of the control design is verified with simulations and experiments on a two-axis positioning system. Also, simulations demonstrating the performance of the control method on a three-axis positioning system are provided. The resulting controller is shown to achieve nanometer level contouring and tracking performance. Simulation results also show its applicability to three-axis nano-positioning systems. Copyright © 2012 by ASME.
      Keywords
      Computationally efficient
      Contour estimation
      Cross coupled control
      High precision positioning
      Iterative learning control
      Positioning system
      Three-axis positioning
      Tracking performance
      Control
      Internal combustion engines
      Model predictive control
      Predictive control systems
      Controllers
      Permalink
      http://hdl.handle.net/11693/28134
      Published Version (Please cite this version)
      http://dx.doi.org/10.1115/DSCC2012-MOVIC2012-8660
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      • Department of Mechanical Engineering 273
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