Nonlinear equivalent circuit model for circular CMUTs in uncollapsed and collapsed mode
Date
2012
Authors
Aydoğdu, Elif
Özgürlük, Alper
Oğuz, H. Kağan
Atalar, Abdullah
Kocabaş, Coşkun
Köymen, Hayrettin
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Abstract
An equivalent electrical circuit model valid for collapsed mode operation of CMUT is described. The across and through variables of the circuit model are chosen to be rms force and rms displacement over the surface of the CMUT membrane. The relation between rms displacement and applied voltage is obtained through analytical calculations utilizing the exact force distribution. The radiation impedance of collapsed mode CMUT is included as a load impedance in the circuit model. The resulting equivalent circuit is merged with uncollapsed mode model, to obtain a simulation tool that covers the whole operation range of CMUT. © 2012 IEEE.
Source Title
2012 IEEE International Ultrasonics Symposium
Publisher
IEEE
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Keywords
Analytical calculation, Applied voltages, Circuit modeling, Equivalent electrical circuit model, Force distributions, Nonlinear equivalent circuit, Radiation impedance, RMS displacements, Circuit theory, Circuit simulation
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Language
English