Nonlinear equivalent circuit model for circular CMUTs in uncollapsed and collapsed mode

Date
2012
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Source Title
2012 IEEE International Ultrasonics Symposium
Print ISSN
1948-5719
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Publisher
IEEE
Volume
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Pages
987 - 990
Language
English
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Abstract

An equivalent electrical circuit model valid for collapsed mode operation of CMUT is described. The across and through variables of the circuit model are chosen to be rms force and rms displacement over the surface of the CMUT membrane. The relation between rms displacement and applied voltage is obtained through analytical calculations utilizing the exact force distribution. The radiation impedance of collapsed mode CMUT is included as a load impedance in the circuit model. The resulting equivalent circuit is merged with uncollapsed mode model, to obtain a simulation tool that covers the whole operation range of CMUT. © 2012 IEEE.

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