Nonlinear equivalent circuit model for circular CMUTs in uncollapsed and collapsed mode
IEEE International Ultrasonics Symposium, IUS
987 - 990
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An equivalent electrical circuit model valid for collapsed mode operation of CMUT is described. The across and through variables of the circuit model are chosen to be rms force and rms displacement over the surface of the CMUT membrane. The relation between rms displacement and applied voltage is obtained through analytical calculations utilizing the exact force distribution. The radiation impedance of collapsed mode CMUT is included as a load impedance in the circuit model. The resulting equivalent circuit is merged with uncollapsed mode model, to obtain a simulation tool that covers the whole operation range of CMUT. © 2012 IEEE.
Equivalent electrical circuit model
Nonlinear equivalent circuit
Published Version (Please cite this version)http://dx.doi.org/10.1109/ULTSYM.2012.0247
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