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dc.contributor.authorÜnlügedik, Aslıen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorKocabaş, Coşkunen_US
dc.contributor.authorOğuz, H. Kağanen_US
dc.contributor.authorKöymen, Hayrettinen_US
dc.coverage.spatialDresden, Germanyen_US
dc.date.accessioned2016-02-08T12:11:15Z
dc.date.available2016-02-08T12:11:15Z
dc.date.issued2012en_US
dc.identifier.issn1948-5719
dc.identifier.urihttp://hdl.handle.net/11693/28105
dc.descriptionDate of Conference: 7-10 October 2012en_US
dc.description.abstractWe present a design method for airborne capacitive micromachined ultrasonic transducers (CMUT). We use an equivalent lumped element circuit to model both electrical and mechanical properties of CMUT and analyze it in frequency domain using harmonic balance approach. We use this method to design CMUTs for large transmitted power generation at low drive voltage amplitude. We determine the dimensions of an airborne CMUT using the proposed method that works at 30 kHz with 5 mm radius, 240 μm membrane thickness and 11.8 μm effective gap height. The CMUT is designed such that an atmospheric depression of 70% of effective gap height is maintained. © 2012 IEEE.en_US
dc.language.isoEnglishen_US
dc.source.title2012 IEEE International Ultrasonics Symposiumen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/ULTSYM.2012.0248en_US
dc.subjectAtmospheric depressionen_US
dc.subjectCapacitive micromachined ultrasonic transduceren_US
dc.subjectElectrical and mechanical propertiesen_US
dc.subjectHarmonic balance approachen_US
dc.subjectLow-drive voltagesen_US
dc.subjectLumped-element circuitsen_US
dc.subjectMembrane thicknessen_US
dc.subjectTransmitted poweren_US
dc.subjectMechanical propertiesen_US
dc.subjectTransducersen_US
dc.subjectUltrasonic transducersen_US
dc.titleElectrically unbiased driven airborne capacitive micromachined ultrasonic transducer designen_US
dc.typeConference Paperen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentDepartment of Physicsen_US
dc.citation.spage991en_US
dc.citation.epage994en_US
dc.identifier.doi10.1109/ULTSYM.2012.0248en_US
dc.publisherIEEEen_US
dc.contributor.bilkentauthorAtalar, Abdullah
dc.contributor.bilkentauthorKöymen, Hayrettin


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