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      • Department of Electrical and Electronics Engineering
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      Electrically unbiased driven airborne capacitive micromachined ultrasonic transducer design

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      Author
      Ünlügedik, Aslı
      Atalar, Abdullah
      Kocabaş, Coşkun
      Oğuz, H. Kağan
      Köymen, Hayrettin
      Date
      2012
      Source Title
      2012 IEEE International Ultrasonics Symposium
      Print ISSN
      1948-5719
      Publisher
      IEEE
      Pages
      991 - 994
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      We present a design method for airborne capacitive micromachined ultrasonic transducers (CMUT). We use an equivalent lumped element circuit to model both electrical and mechanical properties of CMUT and analyze it in frequency domain using harmonic balance approach. We use this method to design CMUTs for large transmitted power generation at low drive voltage amplitude. We determine the dimensions of an airborne CMUT using the proposed method that works at 30 kHz with 5 mm radius, 240 μm membrane thickness and 11.8 μm effective gap height. The CMUT is designed such that an atmospheric depression of 70% of effective gap height is maintained. © 2012 IEEE.
      Keywords
      Atmospheric depression
      Capacitive micromachined ultrasonic transducer
      Electrical and mechanical properties
      Harmonic balance approach
      Low-drive voltages
      Lumped-element circuits
      Membrane thickness
      Transmitted power
      Mechanical properties
      Transducers
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/28105
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ULTSYM.2012.0248
      Collections
      • Department of Electrical and Electronics Engineering 3524
      • Department of Physics 2299
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