Electrically unbiased driven airborne capacitive micromachined ultrasonic transducer design
Author
Ünlügedik, Aslı
Atalar, Abdullah
Kocabaş, Coşkun
Oğuz, H. Kağan
Köymen, Hayrettin
Date
2012Source Title
2012 IEEE International Ultrasonics Symposium
Print ISSN
1948-5719
Publisher
IEEE
Pages
991 - 994
Language
English
Type
Conference PaperItem Usage Stats
142
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89
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Abstract
We present a design method for airborne capacitive micromachined ultrasonic transducers (CMUT). We use an equivalent lumped element circuit to model both electrical and mechanical properties of CMUT and analyze it in frequency domain using harmonic balance approach. We use this method to design CMUTs for large transmitted power generation at low drive voltage amplitude. We determine the dimensions of an airborne CMUT using the proposed method that works at 30 kHz with 5 mm radius, 240 μm membrane thickness and 11.8 μm effective gap height. The CMUT is designed such that an atmospheric depression of 70% of effective gap height is maintained. © 2012 IEEE.
Keywords
Atmospheric depressionCapacitive micromachined ultrasonic transducer
Electrical and mechanical properties
Harmonic balance approach
Low-drive voltages
Lumped-element circuits
Membrane thickness
Transmitted power
Mechanical properties
Transducers
Ultrasonic transducers