Zno nanostructures via hydrothermal synthesis on atomic layer deposited seed-layers
2015 IEEE 35th International Conference on Electronics and Nanotechnology, ELNANO 2015 - Conference Proceedings
Institute of Electrical and Electronics Engineers Inc.
89 - 92
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The original results of two different types of ZnO nanostructures grown via hydrothermal synthesis on ZnO seed-layers coated by atomic layer deposition process on Si substrates were presented. Scanning electron microscopy and X-ray diffractometry were used for the analysis of resulting nanostructured ZnO samples. The influence of annealing on crystal properties of the ZnO nanostructures was shown. It was ascertained that solution composition had a significant influence on the morphology of nanostructures and post-growth annealing modified the crystal properties of nanostructures. © 2015 IEEE.
KeywordsAtomic layer deposition
Atomic layer deposition
Scanning electron microscopy
X ray diffraction analysis
Atomic layer deposited
Published Version (Please cite this version)https://doi.org/10.1109/ELNANO.2015.7146841
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