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      • Department of Electrical and Electronics Engineering
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      A plasmonically enhanced pixel structure for uncooled microbolometer detectors

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      Author(s)
      Erturk O.
      Battal, Enes
      Kucuk, S.E.
      Okyay, Ali Kemal
      Akin, T.
      Date
      2013
      Source Title
      Proceedings of SPIE
      Publisher
      SPIE
      Volume
      8704
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      This paper introduces a method of broadband absorption enhancement that can be integrated with the conventional suspended microbolometer process with no significant additional cost. The premise of this study is that electric field can be enhanced throughout the structural layer of the microbolometer, resulting in an increase in the absorption of the infrared radiation in the long wave infrared window. A concentric double C-shaped plasmonic geometry is simulated using the FDTD method, and this geometry is fabricated on suspended pixel arrays. Simulation results and FTIR measurements are in good agreement indicating a broadband absorption enhancement in the 8 μm - 12 μm range for LWIR applications. The enhancement is attained using metallic geometries embedded in the structural layer of the suspended microbridge, where the metallic-dielectric interface increases the average absorption of a 35 μm pixel from 67.6% to 80.1%. © 2013 SPIE.
      Keywords
      Microbolometer
      Long wave infrared
      Microbolometer
      Reflection suppression
      Surface plasmons
      Wide-band
      Bolometers
      Electric fields
      Finite difference time domain method
      Geometry
      Infrared radiation
      Pixels
      Plasmons
      Temperature sensors
      Permalink
      http://hdl.handle.net/11693/27977
      Published Version (Please cite this version)
      http://dx.doi.org/10.1117/12.2019540
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      • Department of Electrical and Electronics Engineering 3702
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