Modeling and simulation of the ferroelectric based micro gyroscope: FEM analysis
0015-0193 (print)1563-5112 (online)
Taylor and Francis
46 - 58
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Please cite this item using this persistent URLhttp://hdl.handle.net/11693/27898
This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes five steps to perform the critical analysis: design a novel structure, define the failure mechanisms under the given conditions, analyze different vibrations, analyze the operation principle, and detect resonance modes. In addition, MEMS failure modes were analyzed under different scenarios and the obtained results discussed. Copyright © Taylor & Francis Group, LLC.
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