Modeling and simulation of the ferroelectric based micro gyroscope: FEM analysis
Taylor and Francis
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This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes five steps to perform the critical analysis: design a novel structure, define the failure mechanisms under the given conditions, analyze different vibrations, analyze the operation principle, and detect resonance modes. In addition, MEMS failure modes were analyzed under different scenarios and the obtained results discussed. Copyright © Taylor & Francis Group, LLC.
Design and modeling
Model and simulation
Finite element method
Published Version (Please cite this version)http://dx.doi.org/10.1080/00150193.2013.821002
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