Microcavity enhanced amorphous silicon photoluminescence
Proceedings of the 10th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 1997
243 - 244
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A microcavity enhancement of room temperature photoluminescence (PL) of a hydrogenated amorphous silicon (a-Si:h) was performed. A quantum confinement model was developed to describe the occurrence of the PL in the bulk a-Si:H. According to the model, small a-Si clusters are in a matrix of a-Si:H. The regions with Si-H, having larger energy gaps due to strong Si-H bonds, isolate these clusters, and form barrier regions around them. The PL originates from these a-Si clusters.
Chemical vapor deposition
Plasma enhanced chemical vapor deposition (PECVD)
Quantum confinement model