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      Microcavity effects in the photoluminescence of hydrogenated amorphous silicon nitride

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      Author
      Serpengüzel, A.
      Aydinli, A.
      Bek, A.
      Date
      1998
      Source Title
      Proceedings of SPIE - The International Society for Optical Engineering
      Print ISSN
      0277786X
      Volume
      3283
      Pages
      252 - 259
      Language
      English
      Type
      Conference Paper
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      Abstract
      Fabry-Perot microcavities are used for the alteration of photoluminescence in hydrogenated amorphous silicon nitride grown with and without ammonia. The photoluminescence is red-near-infrared for the samples grown without ammonia, and blue-green for the samples grown with ammonia. In the Fabry- Perot microcavities, the amplitude of the photoluminescence is enhanced, while its linewidth is reduced with respect to the bulk hydrogenated amorphous silicon nitride. The microcavity was realized by a metallic back mirror and a hydrogenated amorphous silicon nitride - air or a metallic front mirror. The transmittance, reflectance, and absorbance spectra were also measured and calculated. The calculated spectra agree well with the experimental spectra. The hydrogenated amorphous silicon nitride microcavity has potential for becoming a versatile silicon based optoelectronic device such as a color flat panel display, a resonant cavity enhanced light emitting diode, or a laser. ©2003 Copyright SPIE - The International Society for Optical Engineering.
      Keywords
      Amorphous silicon
      Fabry-Perot
      Microcavity
      Optoelectronics
      Photoluminescence
      Plasma enhanced chemical vapor deposition
      Resonators
      Spontaneous emission
      Thin films
      Ammonia
      Amorphous films
      Electrooptical devices
      Emission spectroscopy
      Fabry-Perot interferometers
      Flat panel displays
      Hydrogenation
      Light emission
      Light emitting diodes
      Low pressure chemical vapor deposition
      Luminescence
      Microcavities
      Mirrors
      Nitrides
      Nonmetals
      Optoelectronic devices
      Photoluminescence
      Physical optics
      Plasma deposition
      Plasma enhanced chemical vapor deposition
      Plasmas
      Resonators
      Semiconducting silicon compounds
      Semiconductor quantum wells
      Silicon nitride
      Spontaneous emission
      Thin films
      Vapors
      Absorbance
      Back mirrors
      Experimental spectrums
      Fabry-Perot
      Hydrogenated amorphous silicon nitrides
      Microcavity
      Microcavity effects
      Optoelectronics
      Resonant cavity enhanced
      Silicon based
      Amorphous silicon
      Permalink
      http://hdl.handle.net/11693/27665
      Published Version (Please cite this version)
      http://dx.doi.org/10.1117/12.316689
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      • Department of Physics 2150

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        Alteration of spontaneous emission in hydrogenated amorphous silicon nitride microcavities 

        Serpengüzel, A.; Aydinli, A.; Bek, A. (Elsevier BV, 1998)
        A Fabry-Perot microcavity is used for the alteration of the spontaneous emission spectrum in hydrogenated amorphous silicon nitride. The modified photon density of states of the Fabry-Perot microcavity are responsible for ...
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        Microcavity enhanced amorphous silicon photoluminescence 

        Serpengüzel, Ali; Aydınlı, Atilla; Bek, Alpan (IEEE, 1997)
        A microcavity enhancement of room temperature photoluminescence (PL) of a hydrogenated amorphous silicon (a-Si:h) was performed. A quantum confinement model was developed to describe the occurrence of the PL in the bulk ...
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        Bayindir, M.; Tanriseven, S.; Aydinli, A.; Özbay, Ekmel (Wiley, 2001)
        We investigated photoluminescence (PL) from one-dimensional photonic band gap structures. The photonic crystals, a Fabry-Perot (FP) resonator and a coupled-microcavity (CMC) structure, were fabricated by using alternating ...

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