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      Microcavity effects in the photoluminescence of hydrogenated amorphous silicon nitride

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      Author
      Serpengüzel, Ali
      Aydınlı, Atilla
      Bek, Alpan
      Date
      1998
      Source Title
      Proceedings of SPIE Vol. 3283, Physics and Simulation of Optoelectronic Devices VI
      Print ISSN
      0277-786X
      Publisher
      SPIE
      Volume
      3283
      Pages
      252 - 259
      Language
      English
      Type
      Conference Paper
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      Abstract
      Fabry-Perot microcavities are used for the alteration of photoluminescence in hydrogenated amorphous silicon nitride grown with and without ammonia. The photoluminescence is red-near-infrared for the samples grown without ammonia, and blue-green for the samples grown with ammonia. In the Fabry- Perot microcavities, the amplitude of the photoluminescence is enhanced, while its linewidth is reduced with respect to the bulk hydrogenated amorphous silicon nitride. The microcavity was realized by a metallic back mirror and a hydrogenated amorphous silicon nitride - air or a metallic front mirror. The transmittance, reflectance, and absorbance spectra were also measured and calculated. The calculated spectra agree well with the experimental spectra. The hydrogenated amorphous silicon nitride microcavity has potential for becoming a versatile silicon based optoelectronic device such as a color flat panel display, a resonant cavity enhanced light emitting diode, or a laser.
      Keywords
      Amorphous silicon
      Fabry-Perot
      Microcavity
      Optoelectronics
      Photoluminescence
      Plasma enhanced chemical vapor deposition
      Resonators
      Spontaneous emission
      Thin films
      Permalink
      http://hdl.handle.net/11693/27665
      Published Version (Please cite this version)
      http://dx.doi.org/10.1117/12.316689
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      • Department of Physics 2299
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