Microcavity effects in the photoluminescence of hydrogenated amorphous silicon nitride
Author
Serpengüzel, Ali
Aydınlı, Atilla
Bek, Alpan
Date
1998Source Title
Proceedings of SPIE Vol. 3283, Physics and Simulation of Optoelectronic Devices VI
Print ISSN
0277-786X
Publisher
SPIE
Volume
3283
Pages
252 - 259
Language
English
Type
Conference PaperItem Usage Stats
155
views
views
171
downloads
downloads
Abstract
Fabry-Perot microcavities are used for the alteration of photoluminescence in hydrogenated amorphous silicon nitride grown with and without ammonia. The photoluminescence is red-near-infrared for the samples grown without ammonia, and blue-green for the samples grown with ammonia. In the Fabry- Perot microcavities, the amplitude of the photoluminescence is enhanced, while its linewidth is reduced with respect to the bulk hydrogenated amorphous silicon nitride. The microcavity was realized by a metallic back mirror and a hydrogenated amorphous silicon nitride - air or a metallic front mirror. The transmittance, reflectance, and absorbance spectra were also measured and calculated. The calculated spectra agree well with the experimental spectra. The hydrogenated amorphous silicon nitride microcavity has potential for becoming a versatile silicon based optoelectronic device such as a color flat panel display, a resonant cavity enhanced light emitting diode, or a laser.
Keywords
Amorphous siliconFabry-Perot
Microcavity
Optoelectronics
Photoluminescence
Plasma enhanced chemical vapor deposition
Resonators
Spontaneous emission
Thin films