Room-temperature scanning Hall probe microscope (RT-SHPM) imaging of garnet films using new high-performance InSb sensors
Date
2002Source Title
IEEE Transactions on Magnetics
Print ISSN
0018-9464
Publisher
IEEE
Volume
38
Issue
5
Pages
2438 - 2440
Language
English
Type
Conference PaperItem Usage Stats
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Abstract
The room-temperature scanning Hall probe microscopy (RT-SHPM) imaging of garnet films using high-performance InSb sensors was discussed. The high-performance InSb micro-Hall sensors were fabricated by optical lithography. It was found that the room-temperature noise figure of the InSb sensors was 6-10 mG/√Hz, which was an order of magnitude better than GaAs-AlGaAs two-dimensional electron gas sensors.
Keywords
Hall effectScanning Hall probe microscopy
Crystalline materials
Electron gas
Garnets
Imaging techniques
Indium compounds
Photolithography
Sensors
Magnetic films