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dc.contributor.authorSahin, O.en_US
dc.contributor.authorYaralioglu, G.en_US
dc.contributor.authorGrow, R.en_US
dc.contributor.authorZappe, S. F.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorQuate, C.en_US
dc.contributor.authorSolgaard, O.en_US
dc.date.accessioned2016-02-08T11:56:17Z
dc.date.available2016-02-08T11:56:17Z
dc.date.issued2003en_US
dc.identifier.isbn0780377311
dc.identifier.urihttp://hdl.handle.net/11693/27548
dc.description.abstractWe present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy.en_US
dc.language.isoEnglishen_US
dc.source.titleTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papersen_US
dc.relation.isversionofhttps://doi.org/10.1109/SENSOR.2003.1216967en_US
dc.subjectNanobioscienceen_US
dc.subjectResonant frequencyen_US
dc.subjectActuatorsen_US
dc.subjectAtomic force microscopyen_US
dc.subjectElasticityen_US
dc.subjectMicrosystemsen_US
dc.subjectNanocantileversen_US
dc.subjectNatural frequenciesen_US
dc.subjectProbesen_US
dc.subjectResonanceen_US
dc.subjectSurface topographyen_US
dc.subjectTransducersen_US
dc.subjectVibrations (mechanical)en_US
dc.subjectFundamental resonance frequencyen_US
dc.subjectMechanical factorsen_US
dc.subjectMechanical interactionsen_US
dc.subjectNanobiosciencesen_US
dc.subjectNanomechanical sensingen_US
dc.subjectOptical imagingen_US
dc.subjectTapping-mode atomic force microscopyen_US
dc.subjectVibrationsen_US
dc.subjectSolid-state sensorsen_US
dc.titleHarmonic cantilevers for nanomechanical sensing of elastic propertiesen_US
dc.typeConference Paperen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.citation.spage1124en_US
dc.citation.epage1127en_US
dc.citation.volumeNumber2en_US
dc.identifier.doi10.1109/SENSOR.2003.1216967en_US
dc.publisherInstitute of Electrical and Electronics Engineers Inc.en_US


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