Harmonic cantilevers for nanomechanical sensing of elastic properties

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Author
Sahin O.
Yaralioglu G.
Grow, R.
Zappe, S.F.
Atalar, A.
Quate, C.
Solgaard O.
Date
2003
Journal Title
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher
Institute of Electrical and Electronics Engineers Inc.
Volume
2
Pages
1124 - 1127
Language
English
Type
Conference Paper
Metadata
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Please cite this item using this persistent URL
http://hdl.handle.net/11693/27548
Abstract
We present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy. © 2003 IEEE.
Published as
http://dx.doi.org/10.1109/SENSOR.2003.1216967
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