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      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
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      Harmonic cantilevers for nanomechanical sensing of elastic properties

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      Author(s)
      Şahin, O.
      Yaralıoğlu, G.
      Grow, R.
      Zappe, S. F.
      Atalar, Abdullah
      Quate, C.
      Solgaard, O.
      Date
      2003-06
      Source Title
      TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
      Publisher
      IEEE
      Pages
      1124 - 1127
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      We present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy.
      Keywords
      Nanobioscience
      Resonant frequency
      Actuators
      Atomic force microscopy
      Elasticity
      Microsystems
      Nanocantilevers
      Natural frequencies
      Probes
      Resonance
      Surface topography
      Transducers
      Vibrations (mechanical)
      Fundamental resonance frequency
      Mechanical factors
      Mechanical interactions
      Nanobiosciences
      Nanomechanical sensing
      Optical imaging
      Tapping-mode atomic force microscopy
      Vibrations
      Solid-state sensors
      Permalink
      http://hdl.handle.net/11693/27548
      Published Version (Please cite this version)
      https://doi.org/10.1109/SENSOR.2003.1216967
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      • Department of Electrical and Electronics Engineering 3702
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