Harmonic cantilevers for nanomechanical sensing of elastic properties
Date
2003-06Source Title
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher
IEEE
Pages
1124 - 1127
Language
English
Type
Conference PaperItem Usage Stats
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Abstract
We present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy.
Keywords
NanobioscienceResonant frequency
Actuators
Atomic force microscopy
Elasticity
Microsystems
Nanocantilevers
Natural frequencies
Probes
Resonance
Surface topography
Transducers
Vibrations (mechanical)
Fundamental resonance frequency
Mechanical factors
Mechanical interactions
Nanobiosciences
Nanomechanical sensing
Optical imaging
Tapping-mode atomic force microscopy
Vibrations
Solid-state sensors