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      Ultrafast and highly efficient resonant cavity enhanced photodiodes

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      Author
      Özbay, Ekmel
      Kimukin, İbrahim
      Bıyıklı, Necmi
      Date
      2003-09
      Source Title
      Proceedings of SPIE ITCOM 2003 - Active and Passive Optical Components for WDM Communications III
      Print ISSN
      0277-786X
      Publisher
      SPIE
      Pages
      389 - 399
      Language
      English
      Type
      Conference Paper
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      Abstract
      In this talk, we will review our research efforts on resonant cavity enhanced (RCE) high-speed high-efficiency photodiodes (PDs) operating in the 1st and 3rd optical communication windows. Using a microwave compatible planar fabrication process, we have designed and fabricated GaAs and InGaAs based RCE photodiodes. For RCE GaAs Schottky type photodiodes, we have achieved peak quantum efficiencies of 50% and 75% with semi-transparent (Au) and transparent (indium-tin-oxide) Schottky layers respectively. Along with 3-dB bandwidths of 50 and 60 GHz, these devices exhibit bandwidth-efficiency (BWE) products of 25 GHz and 45 GHz respectively. By using a postprocess recess etch, we tuned the resonance wavelength of an RCE InGaAs PD from 1605 to 1558 nm while keeping the peak efficiencies above 60%. The maximum quantum efficiency was 66% at 1572 nm which was in good agreement with our theoretical calculations. The photodiode had a linear response up to 6 mW optical power, where we obtained 5 mA photocurrent at 3 V reverse bias. The photodetector had a temporal response of 16 psec at 7 V bias. After system response deconvolution, the 3-dB bandwidth of the device was 31 GHz, which corresponds to a bandwidth-efficiency product of 20 GHz.
      Keywords
      P-i-n photodiode
      Quantum efficiency
      Schottky diode
      Bandwidth
      Cavity resonators
      Electric fields
      Frequency response
      Light absorption
      Light transmission
      Mirrors
      Optical communication
      Photocurrents
      Photodetectors
      Schottky barrier diodes
      Bandwidth-efficiency product
      High-speed photodetectors
      Resonant cavity enhancement
      Photodiodes
      Permalink
      http://hdl.handle.net/11693/27493
      Published Version (Please cite this version)
      http://dx.doi.org/10.1117/12.511202
      Collections
      • Department of Electrical and Electronics Engineering 3337
      • Department of Physics 2149
      • Institute of Materials Science and Nanotechnology 1580

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