High-speed solar-blind AlGaN-based metal-semiconductor-metal photodetectors

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Author
Biyikli, N.
Kimukin, I.
Kartaloglu, T.
Aytur, O.
Ozbay, E.
Date
2003Journal Title
Physica Status Solidi. C: Current Topics in Solid State Physics
Print ISSN
1610-1634
Publisher
Wiley
Issue
7
Pages
2314 - 2317
Language
English
Type
Conference Paper
Metadata
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http://hdl.handle.net/11693/27489Abstract
Solar-blind AlGaN metal-semiconductor-metal (MSM) photodetectors with fast pulse response have been demonstrated. The devices were fabricated on MOCVD-grown epitaxial Al0.38Ga0.62N layers, using a microwave compatible fabrication process. The photodiode samples exhibited low leakage with dark current densities below 1 × 10-6 A/cm 2 at 40 V reverse bias. Photoconductive gain-assisted photoresponse was observed with a peak responsivity of 1.26 A/W at 264 nm. A visible rejection of ∼3 orders of magnitude at 350 nm was demonstrated. Temporal high-speed measurements at 267 nm resulted in fast pulse responses with 3-dB bandwidths as high as 5.4 GHz. This corresponds to a record high-speed performance for solar-blind detectors. © 2003 WILEY-VCH Verlag GmbH & Co. KGaA.