Pressure sensing using micromachined asymmetric integrated vertical coupler
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
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Please cite this item using this persistent URLhttp://hdl.handle.net/11693/27479
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
- Conference Paper 2294