Pressure sensing using micromachined asymmetric integrated vertical coupler

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Author
Kiyat I.
Kocabas, C.
Aydinli, A.
Date
2003
Journal Title
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN
10928081
Volume
2
Pages
515 - 516
Language
English
Type
Conference Paper
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http://hdl.handle.net/11693/27479
Abstract
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
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