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      Pressure sensing using micromachined asymmetric integrated vertical coupler

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      Author(s)
      Kıyat, İsa
      Kocabaş, Coşkun
      Aydınlı, Atilla
      Date
      2003
      Source Title
      Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003
      Print ISSN
      1092-8081
      Publisher
      IEEE
      Pages
      515 - 516
      Language
      English
      Type
      Conference Paper
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      Abstract
      Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
      Keywords
      Computer simulation
      Finite element method
      Integrated optoelectronics
      Optical waveguides
      Pressure measurement
      Refractive index
      Silicon on insulator technology
      Single mode fibers
      Two dimensional
      Beam propagation method
      Integrated vertical coupler
      Single mode waveguide
      Optical sensors
      Permalink
      http://hdl.handle.net/11693/27479
      Published Version (Please cite this version)
      https://doi.org/10.1109/LEOS.2003.1252900
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      • Department of Physics 2397
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