Pressure sensing using micromachined asymmetric integrated vertical coupler

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Author
Kıyat, İsa
Kocabaş, Coşkun
Aydınlı, Atilla
Date
2003
Source Title
Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003
Print ISSN
1092-8081
Publisher
IEEE
Pages
515 - 516
Language
English
Type
Conference Paper
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Abstract
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
Keywords
Computer simulation
Finite element method
Integrated optoelectronics
Optical waveguides
Pressure measurement
Refractive index
Silicon on insulator technology
Single mode fibers
Two dimensional
Beam propagation method
Integrated vertical coupler
Single mode waveguide
Optical sensors
Permalink
http://hdl.handle.net/11693/27479
Published Version (Please cite this version)
https://doi.org/10.1109/LEOS.2003.1252900
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