Pressure sensing using micromachined asymmetric integrated vertical coupler

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Author
Kiyat I.
Kocabas, C.
Aydinli, A.
Date
2003
Source Title
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Print ISSN
10928081
Volume
2
Pages
515 - 516
Language
English
Type
Conference Paper
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Abstract
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
Keywords
Computer simulation
Finite element method
Integrated optoelectronics
Optical waveguides
Pressure measurement
Refractive index
Silicon on insulator technology
Single mode fibers
Two dimensional
Beam propagation method
Integrated vertical coupler
Single mode waveguide
Optical sensors
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http://hdl.handle.net/11693/27479
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