Pressure sensing using micromachined asymmetric integrated vertical coupler

Kiyat I.; Kocabas, C.; Aydinli, A.

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Author

Kiyat I.

Kocabas, C.

Aydinli, A.

Date

2003

Journal Title

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Language

English

Type

Conference Paper

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http://hdl.handle.net/11693/27479

Abstract

Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.

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