Novel integrated optical displacement sensor for scanning force microscopies
Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003
517 - 518
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A novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.
Finite element method
Optical displacement sensor
Scanning force microscopy
Software Package ANSYS
Published Version (Please cite this version)https://doi.org/10.1109/LEOS.2003.1252901
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