Novel integrated optical displacement sensor for scanning force microscopies
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
517 - 518
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A novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.
Finite element method
Optical displacement sensor
Scanning force microscopy
Software Package ANSYS
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