• About
  • Policies
  • What is openaccess
  • Library
  • Contact
Advanced search
      View Item 
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Science
      • Department of Physics
      • View Item
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Science
      • Department of Physics
      • View Item
      JavaScript is disabled for your browser. Some features of this site may not work without it.

      Nano and micro Hall-effect sensors for room-temperature scanning hall probe microscopy

      Thumbnail
      View/Open
      Full printable version (361.9Kb)
      Author
      Sandhu, A.
      Okamoto, A.
      Shibasaki, I.
      Oral, A.
      Date
      2004
      Journal Title
      Microelectronic Engineering
      Print ISSN
      0167-9317
      Electronic ISSN
      1873-5568
      Volume
      73-74
      Pages
      524 - 528
      Language
      English
      Type
      Conference Paper
      Metadata
      Show full item record
      Please cite this item using this persistent URL
      http://hdl.handle.net/11693/27458
      Abstract
      GaAs/AlGaAs two-dimensional electron gas (GaAs-2DEG) Hall probes are impractical for sub-micron room-temperature scanning Hall microscopy (RT-SHPM), due to surface depletion effects that limit the Hall driving current and magnetic sensitivity (Bmin). Nano and micro Hall-effect sensors were fabricated using Bi and InSb thin films and shown to be practical alternatives to GaAs-2DEG probes for high resolution RT-SHPM. The GaAs-2DEG and InSb probes were fabricated using photolithography and the Bi probes by optical and focused ion beam lithography. Surface depletion effects limited the minimum feature size of GaAs-2DEG probes to ∼1.5 μm2 with a maximum drive current Imax of ∼3 μA and Bmin∼0.2 G/Hz. The B min of 1.5 μm2 InSb Hall probes was 6×10 -3 G/Hz at Imax of 100 μA. Further, 200 nm×200 nm Bi probes yielded good RT-SHPM images of garnet films, with Imax and sensitivity of 40 μA and ∼0.80 G/Hz, respectively.
      Published as
      http://dx.doi.org/10.1016/j.mee.2004.03.029
      Collections
      • Department of Physics 2138

      Browse

      All of BUIRCommunities & CollectionsTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartmentsThis CollectionTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartments

      My Account

      Login

      Statistics

      View Usage Statistics

      Bilkent University

      If you have trouble accessing this page and need to request an alternate format, contact the webmaster. Phone: (312) 290 1771
      Copyright © Bilkent University | Library IT

      Contact Us | Send Feedback | Off-Campus Access | Admin