Plasma enhanced chemical vapor deposition of low loss as-grown germanosilicate layers for optical waveguides
Proceedings of SPIE - The International Society for Optical Engineering
511 - 517
Item Usage Stats
MetadataShow full item record
We report on systematic growth and characterization of low-loss germanosilicate layers for use in optical waveguides. Plasma enhanced chemical vapor deposition (PECVD) technique was used to grow the films using silane, germane and nitrous oxide as precursor gases. Chemical composition was monitored by Fourier transform infrared (FTIR) spectroscopy. N-H bond concentration of the films decreased from 0.43 ×1022 cm -3 down to below 0.06x 1022 cm-3, by a factor of seven as the GeH4 flow rate increased from 0 to 70 seem. A simultaneous decrease of O-H related bonds was also observed by a factor of 10 in the same germane flow range. The measured TE loss rates at λ=632.8 nm were found to increase from are 0.20 ± 0.02 to 6.46 ± 0.04 dB/cm as the germane flow rate increased from 5 to 50 seem, respectively. In contrast, the propagation loss values for TE polarization at λ-1550 nm were found to decrease from 0.32 ± 0.03 down to 0.14 ± 0.06 dB/cm for the same samples leading to the lowest values reported so far in the literature, eliminating the need for high temperature annealing as is usually done for these materials to be used in waveguide devices.
Fourier transform infrared spectroscopy
Plasma enhanced chemical vapor deposition
Published Version (Please cite this version)http://dx.doi.org/10.1117/12.546080
Showing items related by title, author, creator and subject.
Akar, N.; Gunalay, Y. (Elsevier, 2013)Optical buffering based on fiber delay lines (FDLs) has been proposed as a means for contention resolution in an optical packet switch. In this article, we propose a queuing model for feedback-type shared-per-node recirculating ...
Volpe, G.; Volpe, Giovanni; Gigan, S. (SPIE, 2014)Optical tweezers have been widely used in physics, chemistry and biology to manipulate and trap microscopic and nanoscopic objects. Current optical trapping techniques rely on carefully engineered setups to manipulate ...
Kiyat, I.; Aydinli, A.; Dagli, N. (IEEE, 2005)We report on the development of compact optical racetrack resonators on silicon-on-insulator (SOI) rib waveguides. We make use of large-cross-section waveguides instead of photonic wire waveguides. We fabricated resonators ...