Integrated asymmetric vertical coupler pressure sensors

Date
2004
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Source Title
Proceedings of SPIE Vol. 5455, MEMS, MOEMS, and Micromachining
Print ISSN
0277-786X
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Publisher
SPIE
Volume
5455
Issue
Pages
27 - 35
Language
English
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Abstract

Design and analysis of a novel pressure sensor based on a silicon-on-insulator asymmetric integrated vertical coupler is presented. The coupler is composed of a single mode low index waveguide and a thin silicon slab. Wavelength selective optical modulation of asymmetric vertical coupler is examined in detail. Its potential for sensing applications is highlighted as an integrated optical pressure sensor which can be realized by standard silicon micro-fabrication. Sensitivity of transmission of such couplers on refractive index change of silicon slab ensures that they are good candidates for applications requiring high sensitivities.

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