Integrated asymmetric vertical coupler pressure sensors
Author
Kıyat, İsa
Kocabaş, Aşkın
Akçağ, İmran
Aydınlı, Atilla
Date
2004Source Title
Proceedings of SPIE Vol. 5455, MEMS, MOEMS, and Micromachining
Print ISSN
0277-786X
Publisher
SPIE
Volume
5455
Pages
27 - 35
Language
English
Type
Conference PaperItem Usage Stats
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Abstract
Design and analysis of a novel pressure sensor based on a silicon-on-insulator asymmetric integrated vertical coupler is presented. The coupler is composed of a single mode low index waveguide and a thin silicon slab. Wavelength selective optical modulation of asymmetric vertical coupler is examined in detail. Its potential for sensing applications is highlighted as an integrated optical pressure sensor which can be realized by standard silicon micro-fabrication. Sensitivity of transmission of such couplers on refractive index change of silicon slab ensures that they are good candidates for applications requiring high sensitivities.
Keywords
Integrated opticsPressure sensor
Stress-optic effect
Wavelength-selective coupler
Computer simulation
Differential equations
Electromagnetic waves
Finite element method