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      • Department of Electrical and Electronics Engineering
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      Integrated asymmetric vertical coupler pressure sensors

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      Author
      Kıyat, İsa
      Kocabaş, Aşkın
      Akçağ, İmran
      Aydınlı, Atilla
      Date
      2004
      Source Title
      Proceedings of SPIE Vol. 5455, MEMS, MOEMS, and Micromachining
      Print ISSN
      0277-786X
      Publisher
      SPIE
      Volume
      5455
      Pages
      27 - 35
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      Design and analysis of a novel pressure sensor based on a silicon-on-insulator asymmetric integrated vertical coupler is presented. The coupler is composed of a single mode low index waveguide and a thin silicon slab. Wavelength selective optical modulation of asymmetric vertical coupler is examined in detail. Its potential for sensing applications is highlighted as an integrated optical pressure sensor which can be realized by standard silicon micro-fabrication. Sensitivity of transmission of such couplers on refractive index change of silicon slab ensures that they are good candidates for applications requiring high sensitivities.
      Keywords
      Integrated optics
      Pressure sensor
      Stress-optic effect
      Wavelength-selective coupler
      Computer simulation
      Differential equations
      Electromagnetic waves
      Finite element method
      Permalink
      http://hdl.handle.net/11693/27403
      Published Version (Please cite this version)
      https://doi.org/10.1117/12.546070
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      • Department of Electrical and Electronics Engineering 3524
      • Department of Physics 2299
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