Design, fabrication and characterization of high-performance solarblind AlGaN photodetectors

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Author
Ozbay, E.
Date
2005
Journal Title
Proceedings of SPIE - The International Society for Optical Engineering
ISSN
0277786X
Volume
6013
Language
English
Type
Conference Paper
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Please cite this item using this persistent URL
http://hdl.handle.net/11693/27354
Abstract
Design, fabrication, and characterization of high-performance AlxGal-xN-based photodetectors for solar-blind applications are reported. AlxGal-xN heterostructures were designed for Schottky, p-i-n, and metal-semiconductor-metal (MSM) photodiodes. The resulting solar-blind AlGaN detectors exhibited low dark current, high detectivity, and high bandwidth.
Published as
http://dx.doi.org/10.1117/12.630086
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