Design, fabrication and characterization of high-performance solarblind AlGaN photodetectors
Proceedings of SPIE - The International Society for Optical Engineering
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Please cite this item using this persistent URLhttp://hdl.handle.net/11693/27354
Design, fabrication, and characterization of high-performance AlxGal-xN-based photodetectors for solar-blind applications are reported. AlxGal-xN heterostructures were designed for Schottky, p-i-n, and metal-semiconductor-metal (MSM) photodiodes. The resulting solar-blind AlGaN detectors exhibited low dark current, high detectivity, and high bandwidth.