Radiation impedance and equivalent circuit for immersed CMUT array element
Author
Şenlik, Muhammed N.
Atalar, Abdullah
Köymen, Hayrettin
Olcum, Selim
Date
2006-10Source Title
Proceedings - IEEE Ultrasonics Symposium
Publisher
IEEE
Pages
1951 - 1954
Language
English
Type
Conference PaperItem Usage Stats
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Abstract
In this paper, we present equivalent circuit for immersed capacitive micromachined ultrasonic transducers (cMUT), based on an accurate parametric model. We also present an accurate approximation for the radiation impedance cMUT. We develop a design approach for immersed cMUTs using the equivalent circuit. We demonstrate that the equivalent circuit predicts the performance of a cMUT array element composed of many cells in parallel. We investigate the applicability of the equivalent circuit in designing cMUT array elements. © 2006 IEEE.
Keywords
Array elementsCapacitive micromachined ultrasonic transducer
Design approaches
Parametric models
Radiation impedance
Equivalent circuits
Ultrasonics
Ultrasonic transducers