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      • Department of Electrical and Electronics Engineering
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      Radiation impedance and equivalent circuit for immersed CMUT array element

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      Author
      Şenlik, Muhammed N.
      Atalar, Abdullah
      Köymen, Hayrettin
      Olcum, Selim
      Date
      2006-10
      Source Title
      Proceedings - IEEE Ultrasonics Symposium
      Publisher
      IEEE
      Pages
      1951 - 1954
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      In this paper, we present equivalent circuit for immersed capacitive micromachined ultrasonic transducers (cMUT), based on an accurate parametric model. We also present an accurate approximation for the radiation impedance cMUT. We develop a design approach for immersed cMUTs using the equivalent circuit. We demonstrate that the equivalent circuit predicts the performance of a cMUT array element composed of many cells in parallel. We investigate the applicability of the equivalent circuit in designing cMUT array elements. © 2006 IEEE.
      Keywords
      Array elements
      Capacitive micromachined ultrasonic transducer
      Design approaches
      Parametric models
      Radiation impedance
      Equivalent circuits
      Ultrasonics
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/27201
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ULTSYM.2006.493
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      • Department of Electrical and Electronics Engineering 3597
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